This review describes the state-of-the-art of miniaturized lithium-ion batteries for on-chip electrochemical energy storage, with a focus on cell micro/nano-structures, fabrication techniques and corresponding material selections. . Various specific roles that photolithography plays in microbatteries (MBs) fabrication, including templates for 2D and 3D micropatterns, MB active components, and the sacrificial layer for constructing micro-Swiss-roll structure, are elaborated. The challenges and future directions of MBs. . Stretchable energy-storage devices are required to power next-generation wearable electronics intimately integrated with the human body. Lithium-ion batteries with relatively high energy and power densities, are considered to be favorable on-chip. .
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